Expected Notch Dimensions
For wafers with an alignment notch, you specify the expected notch width and depth. Specifying expected wafer diameter shows the parameters that you specify for a notched wafer.
Specifying expected notch dimensions
Note: The width of a notch is measured along the nominal perimeter of the wafer; the width of a notch is not the minimum distance between the two corners of the notch. The notch depth is measured from the deepest point of the notch to the nominal wafer perimeter along the wafer radius. The figure below shows how the notch width and depth are measured.
Note that you can specify the expected minimum and maximum depth and width for the notch. Wafers with notches whose dimensions are outside of the ranges you specify will not be found by the tool.